Lithography & Photoresist
Lithography
Photoresis
t
Brewer Science CEE 4000 Wafer Track
CEE
1000
Hot Plate
FAS MicroE
-
200 Extrusion Coat
ing System
T
EL Clean Track A
CT
8
TEL Clean Track M
ARK
8
ABM 60
UV
Mask Aligner
GCA XLS 7800 DUV Steppe
r
Karl Suss MA24 Mask
Aligner
Karl Suss MA25 Mask Aligner
Karl Suss MA56 Mask Aligner
Karl Suss MA150 Mask Aligner
SVGL MICRASCAN MPT
193nm
Scanner
Tamarack Scientific 165 Mask Aligner
