processing 200mm wafers and linked to TEL
Act 8. Tool uses catadioptric lens design
incorporating both reflective and refractive
optical elements.
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| SVGL MICRASCAN MPT 193nm Scanner |
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| Download SVGL MPT Micrascan Scanner |
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| Click Photos to Enlarge |
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| SVG DUV (193nm) stepper configured for processing 200mm wafers and linked to TEL Act 8. Tool uses catadioptric lens design incorporating both reflective and refractive optical elements. |
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