photoresist wafer track configured with two
coaters and two developers.The TEL Clean
Track Act 8 is the industry standard 200mm
coater/developer, providing Airborne
chemical filtration, innovative chemical
dispense systems, and excellent thermal
uniformity of PEB hotplates allowing for
state-of-the-art 193nm processing. The ACT
8 offers unsurpassed uptime performance
through optimized equipment accessibility
and superior component reliability.
