Brewer Science Coat/Bake Track System CEE 4000
Download
Auto Dispense
Options Information
Download
System Features
Multiple Sizes: 2", 3", 100mm
Auto Dispense, backside rinse (BSR), 5 Cartridge Top Side Dispenses
(360 mL)
Spin Chuck, .75" (for 2 and 3" wafers), 2.25" (for 100 mm wafers)
Hot plate, 400°C
110V AC
Click to Enlarge
Click to Enlarge
Click to Enlarge