computerized, high-sensitivity surface profiler that
measures roughness, waviness, and step height in
a variety of applications. It features the ability to
measure micro-roughness with 1 Å resolution over
short distances as well as waviness over a full,
210-mm (8.2-in) scan. The built-in PC/AT computing
power offers precise, automatic measurement
capability, data storage, and data analysis. The
Tencor P-1 can profile a variety of materials,
including magnetic disks, semiconductor wafers,
precision-machined and polished surfaces,
ceramics for micro-electronics, glass for flat panel
displays and optical surfaces.
