SemiTherm VTP 1500 LH LPCVD (SiN) Reactor
Download SemiTherm VTP 1500 Reactor Schematic Diagram
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SemiTherm VTP 1500 LH LPCVD (SiN) Reactor is
configured for SiN processing of 200 mm wafers. System
is fully automated with cassette to cassette handling and
offers high throughput.
Quartzwares Available for Purchase with Tool:

  • Tower, Quartz, 5" ID, 20.3" L, New (x2)
  • Tower, Quartz, 6" ID, 20.3" L, New (x4)
  • Tower, Quartz, 8" ID, 20.3" L, New (x2)
  • Tower, Quartz, 4" ID, 20.3" L, Used (x1)
  • Tower, Quartz, 6" ID, 20.3" L, Used (x1)
  • Tower, Quartz, 8" ID, 20.3" L, Used (x4)
  • Bell Jar, 9" ID, 30" L, New (x1)
  • Bell Jar, 9" ID, 30" L, Used (x4)
  • Tower Base (x5)
  • Exhaust Sleeve (x4)
  • Tower Base Plate (x2)
  • Tower Shield (x1)
  • Quartz Inject Holder (x8)
  • Gas Snorkels, New (x31)
  • Thermocouple Sheaths, New (x19)