Reactor is configured for SiN processing of
200 mm wafers. System is fully automated
with cassette to cassette handling and offers
high throughput.
- Tower, Quartz, 5" ID, 20.3" L, New (x2)
- Tower, Quartz, 6" ID, 20.3" L, New (x4)
- Tower, Quartz, 8" ID, 20.3" L, New (x2)
- Tower, Quartz, 4" ID, 20.3" L, Used (x1)
- Tower, Quartz, 6" ID, 20.3" L, Used (x1)
- Tower, Quartz, 8" ID, 20.3" L, Used (x4)
- Bell Jar, 9" ID, 30" L, New (x1)
- Bell Jar, 9" ID, 30" L, Used (x4)
- Tower Base (x5)
- Exhaust Sleeve (x4)
- Tower Base Plate (x2)
- Tower Shield (x1)
- Quartz Inject Holder (x8)
- Gas Snorkels, New (x31)
- Thermocouple Sheaths, New (x19)
