Dry Etching
AMAT Centura 5200 Etch
er
AMAT Centura 5200 eMXP Etch
er
AMAT AME 8100 Plasma Etch
er
GaSonics PEP 4800DL Iridia
LAM Research TCP 9400
SE
LAM Research TCP 9600
PTX
MRC RIE-51 Reactive Ion Etcher
STS
ASPECT
Cluster Etche
r
Technics Micro Stripper Series 220 Plasma System
