• Microprocessor control of output with input monitoring
• Multi-programming capabilities
• Process interrupt indicator (‘ABORT’)
• Process indicator lights
• Cycle complete light and sonalert
• Electropolished 316 stainless steel chamber
• Internal chamber welds
• Two independent overtemperature safety switches
• Preheated nitrogen
• Front loading HMDS vacuum safe holding one quart size chemical bottle
• Clearance for robotic pickup of cassettes
• Audible alarm override switch
• Nitrogen surge control valve
• 24 VAC instrumentation
• Infrared HMDS level sensor with low level indicator
