Veeko Wyko NT3300 Profiling System
Veeko Wyko NT 3300 Profiling System, a non-contact
optical profiler, utilizes two technologies to measure a
wide range of surface heights. Phase-shifting
interferometry (PSI) allows measurement of smooth
surfaces and small steps, while vertical scanning
interferometry (VSI) allows measurement of rough
surfaces and steps up to several millimeters high.