Varian Sputtering System 3180
Varian 3180 magnetron sputtering system is configured for
metal deposition on 4" wafers and upgradeable to 5" wafers.
This system offers the following features:
metal deposition on 4" wafers and upgradeable to 5" wafers.
This system offers the following features:
- Fully automated with cassette-to -cassette operation.
- Equipped with 3 targets and a pre-sputter etch unit.
- Recently upgraded with ferrofluidic feedthrough.
- System comes with shielding replacement spares.
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