Varian Sputtering System 3180
Varian 3180 magnetron sputtering system is configured  for
metal deposition on 4" wafers and upgradeable to 5" wafers.
This system offers the  following features:

  • Fully automated with cassette-to -cassette operation.
  • Equipped with 3 targets and a pre-sputter etch unit.
  • Recently upgraded with ferrofluidic feedthrough.
  • System comes with shielding replacement spares.
Click to Enlarge
Click to Enlarge
Click to Enlarge