Thermco Model 4504 Four Stack LPCVD Reactor configured for PolySi, Silicon Nitride,
SiO2/PSG/BPSG, and TEOS/PTEOS/BPTEOS. System is complete and in excellent
working condition. System is capable of processing wafers up to 6" in diameter.
System is equipped with all SiC paddles and TMX 9000 controllers.
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Thermco 4504 LPCVD Reactor