system used to locate, count, and size
defects down to 0.1 µm.
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| Tencor Surfscan 6200 |
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| Click Photos to Enlarge |
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| Download Tencor Surfscan 6200 Description |
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| Tencor Surfscan 6200 wafer surface analysis system used to locate, count, and size defects down to 0.1 µm. |
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