Technics Micro Stripper Series 220 Plasma System
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Technics Micro Stripper Series 220 Plasma System is a low temperature plasma
etcher used for photoresist stripping. Unit includes and features the following:
etcher used for photoresist stripping. Unit includes and features the following:
- Vacuum pump
- Dual gas introduction system
- Stainless steel reactor
- 500W,13.56 MHz RF generator
- Process timer
- Digital readout on all process parameters and functions
- Stainless steel wafer boat that accomodates 3" to 6" wafers
