side, backside, or front and backside of
200mm wafers. Scrubbing may be
performed using a high pressure DI water jet
or Megasonic DI water supply.
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| TEL SS-2/4 Double-Sided Wafer Scrubber |
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| TEL SS-2/4 configured for scrubbing front side, backside, or front and backside of 200mm wafers. Scrubbing may be performed using a high pressure DI water jet or Megasonic DI water supply. |
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| Click Photos to Enlarge |
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| Download Tel SS-2 Scrubber Configuration |
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