SemiTherm VTP 1500 LH LPCVD (SiO2/PolySi) Reactor

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Semitherm VTP 1500 LH uniquely configured for thermal oxidation and LPCVD PolySi.

Download SemiTherm VTP 1500  Reactor Schematic Pg.1

Download SemiTherm VTP 1500 Reactor Schmatic Pg.2

Download SemiTherm VTP 1500 Reactor Schematic Pg.3

Quartzwares Available for Purchase with Tool:

• Tower, Quartz, 5" ID, 20.3" L, New (x2)
  
• Tower, Quartz, 6" ID, 20.3" L, New (x4)
  
• Tower, Quartz, 8" ID, 20.3" L, New (x2)
  
• Tower, Quartz, 4" ID, 20.3" L, Used (x1)
  
• Tower, Quartz, 6" ID, 20.3" L, Used (x1)
  
• Tower, Quartz, 8" ID, 20.3" L, Used (x4)
  
• Bell Jar, 9" ID, 30" L, New (x1)
  
• Bell Jar, 9" ID, 30" L, Used (x4)
  
• Tower Base (x5)
  
• Exhaust Sleeve (x4)
  
• Tower Base Plate (x2)
  
• Tower Shield (x1)
  
• Quartz Inject Holder (x8)
  
• Gas Snorkels, New (x31)
  
• Thermocouple Sheaths, New (x19)