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| STS ASPECT Cluster Etcher |
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| Download STS ASPECT Cluster Etcher Description |
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| STS dual chamber ICP cluster etcher (200mm) configured for Bosch process. Both chambers are identical in configuration with gases and corresponding MFC sizes, as shown below: C4F8 400 sccm SF6 600 sccm O2 100 sccm Ar 50 sccm CF4 50 sccm CHF3 100 sccm HBr 200 sccm BCl3 100 sccm Cl2 200 sccm He 100 sccm N2 100 sccm N2 200 sccm |
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