process. Both chambers are identical in configuration with gases and
corresponding MFC sizes, as shown below:
C4F8 400 sccm
SF6 600 sccm
O2 100 sccm
Ar 50 sccm
CF4 50 sccm
CHF3 100 sccm
HBr 200 sccm
BCl3 100 sccm
Cl2 200 sccm
He 100 sccm
N2 100 sccm
N2 200 sccm
