used for processing Sacrificial Surface Micro-machining
(SSM) devices to remove post-etch rinsing fluids while
avoiding stiction problems that can damage suspended
microstructures.
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| SC Fluids CPD1100 Supercritical CO2 Cleaner/Dryer |
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| Download SC Fluids CPD 1100 Specs |
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| Click Photos to Enlarge |
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| SC Fluids CPD 1100 Supercritical CO2 Dryer system used for processing Sacrificial Surface Micro-machining (SSM) devices to remove post-etch rinsing fluids while avoiding stiction problems that can damage suspended microstructures. |
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