Keithley Quantox 64000 Silicon and Oxide Monitoring System
Quantox 64000, a non-contact, corona-based silicon and oxide
charge monitoring system configured for wafer-to-wafer cassette
handling of 200 mm wafers. System measures electrical
characteristics such as charge composition, interface quality,
dielectric thickness, and charge contamination of semiconductors
and dielectric films. Measurements performed with easy to use
Windows NT-based software interface. An Offline Recipe Generator
and Data Analysis package provides added remote recipe generation
and data analysis capabilities.
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