Philips Technos TREX 620 Total Reflection
X-ray Fluorescence Spectrometer
Philips Technos TREX 620 total reflection X-ray
fluorescence spectrometer system designed for the
measurement of surface contamination on 150mm and
200mm silicon and compound semiconductor wafers.
System designed for inline process control in the clean
room. Spectrometer equipped with a tungsten anode
sealed x-ray tube and an additional molybdenum anode
sealed tube. System has built in P-C with touch screen
display and fully automated cassette loading.