Philips Technos TREX 620 Total Reflection
X-ray Fluorescence Spectrometer
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Philips Technos TREX 620 total reflection X-ray
fluorescence spectrometer system designed for the
measurement of surface contamination on 150mm and
200mm silicon and compound semiconductor wafers.
System designed for inline process control in the clean
room. Spectrometer equipped with a tungsten anode
sealed x-ray tube and an additional molybdenum anode
sealed tube. System has built in P-C with touch screen
display and fully automated cassette loading.