Wafer Testing
Dektak 3030 Surface Profiler (2)
Digital Instruments Nanoscope III Scanning Probe Microscope
Keithley Quantox 64000 Silicon and Oxide Monitoring System
KLA Tencor Surfscan 6200 Particle Counter
Metricon 2010 Prism Coupler
Nanometrics NanoSpec AFT 200
Thickness Measurement System
Nicolet Magna 560
FTIR Spectrometer
Philips Technos TREX 620
Total Reflection X-Ray Fluorescence Spectrometer
Tencor P-1 Long Scan Profiler
Therma-Wave OptiProbe 26
9
0 DUV
Therma-Wave OptiProbe 5240 DUV
Umech Technologies Microvision Networked Probe Station
Veeco
Dektak 200-Si Profilometer
Veeco Wyko NT3300 Profiling System
