MTI FlexiFab Track
(Tool linked to  
GCA XLS 7800 248nm DUV Stepper)
Click Photos to Enlarge
Download MTI FlexiFab Track
MTI FlexiFab
GCA XLS 7800
MTI Multi-module 200mm tool linked to GCA
248nm stepper. Tool applies photoresist to
wafers, spins it to prescribed thickness,
bakes resist, and hands it off to stepper for
patern exposure. After exposure, tool bakes
wafer and develops exposed image.

This file is not intended to be viewed directly using a web browser. To create a viewable file, use the Preview in Browser or Publish to Yahoo! Web Hosting commands from within Yahoo! SiteBuilder.