- 2 chambers one of which is for Al
etching and the other for microwave
stripping.
- Features A6 platform.
- Envision software and E chuck.
- System configured for 8" wafers.
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| LAM Research TCP 9600 PTX |
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| Download LAM Research TCP 9600 PTX Configurations |
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| Click Photos to Enlarge |
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Lam Research features the following:
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