Kokusai DJ-815V-8L LPCVD Reactor
  • Load-locked, fully automated (CX 2003A controller)

  • High throughput

  • Cassette-to-cassette vertical reactor  

  • Capable of handling 8" (200 mm) wafers

  • Configured for deposition of both doped Polysi and Silicon nitride

         **Item is crated, but crates can be opened if needed for inspection**
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