Karl Suss MA150 Mask Aligner
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The Karl Suss MA 150 is a mask alignment and
exposure system which offers unsurpassed, highly
economical mass production capabilities for
cassette to cassette handling of wafers up to 150
mm in diameter. The microprocessor control and
the CRT display ensure accurate and rapid data
entry, and the program storage capability allows
ease of setup. Wafer alignment is simple, quick,
and precise due to very functional alignment stage
manipulators.
exposure system which offers unsurpassed, highly
economical mass production capabilities for
cassette to cassette handling of wafers up to 150
mm in diameter. The microprocessor control and
the CRT display ensure accurate and rapid data
entry, and the program storage capability allows
ease of setup. Wafer alignment is simple, quick,
and precise due to very functional alignment stage
manipulators.
