Download KLA 8100E CD SEM Description
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KLA 8100 CD SEM designed to perform automated CD
measurements on submicron IC features reliably,
accurately, and rapidly. System accommodates 100, 125,
150, and 200 mm wafers from three cassette platforms
located at the front of the instrument with no hardware
modifications. The KLA 8100’s advanced automation
capability allows it to operate completely unattended at
speeds in excess of 40 wafers per hour.

**Separate Kinetic Systems Vibraplane Air Table
available for purchase with system.  
Dimensions of table are 54"W x 38"L x 36"H."**