IPEC Westech AVANTI 472 Chemical Mechanical Polisher
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Fully automated, single wafer IPEC polisher
designed to accommodate 100 to 200mm
diameter wafers. Polisher features automatic
wafer loading/unloading and the capability of
two-step polishing to maximize wafer
processing capability and quality.
designed to accommodate 100 to 200mm
diameter wafers. Polisher features automatic
wafer loading/unloading and the capability of
two-step polishing to maximize wafer
processing capability and quality.
