used in semiconductor fabrication. The system features
a 60l/min gas throughput and decomposition rates of
over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3,
CO and SF6.
The Hitachi SCDS offers superior cost of ownership
versus Capture/Re-cycle; Combustion; or Chemical
Conversion technologies since it uses little electricity,
only 1 gpm of water, and has a catalyst lifetime of more
than 4,600 hours. The SCDS-60 has a footprint of only
37" Wx19.5 " Dx77"H. and is fully S2-93 and CE
compliant.
