Tencor Flexus FLX 2320
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Tencor Flexus FLX-2320 thin-film stress
measurement system. Instrument accurately
measures changes in the radius of curvature of
substrates caused by deposition of stressed thin
films on those substrates.
measurement system. Instrument accurately
measures changes in the radius of curvature of
substrates caused by deposition of stressed thin
films on those substrates.
