system. Auto cassette load for 100 to 200mm
wafers, 40 wafers/hour with 49 sites, typical
measurement time 1s/site, measurement
range 5mOhm/sq to 5MOhm/sq, minimum
edge exclusion less than 3 mm, polar,
rectangular, and line mapping patterns.
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| CDE ResMap 168 Four Point Probe Resistivity Mapping System |
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| Download CDE ResMap Specs |
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| Click Photos to Enlarge |
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| CDE ResMap 168 resistivity mapping system. Auto cassette load for 100 to 200mm wafers, 40 wafers/hour with 49 sites, typical measurement time 1s/site, measurement range 5mOhm/sq to 5MOhm/sq, minimum edge exclusion less than 3 mm, polar, rectangular, and line mapping patterns. |
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