CDE ResMap 168 Four Point Probe Resistivity Mapping System
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CDE ResMap 168 resistivity mapping
system. Auto cassette load for 100 to 200mm
wafers, 40 wafers/hour with 49 sites, typical
measurement time 1s/site, measurement
range 5
mOhm/sq to 5MOhm/sq, minimum
edge exclusion less than 3 mm, polar,
rectangular, and line mapping patterns.

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