Rudolph AutoEL Ellipsometer
Rudolph Research Auto EL Ellipsometer with
operating wavelength of 632.8nm and maximum
sample size of 150mm x 150mm.

Resolution & accuracy:
Polarizer or analyzer: 0.05°
Delta: 0.1°
PSI: 0.05°

Measuring time:

Single film: 15 seconds
Double film: 20 seconds

Power Requirement:
115 V     50/60 Hz     1 Phase
Click Photos to Enlarge

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