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Rudolph AutoEL Ellipsometer
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Rudolph Research Auto EL Ellipsometer with
operating wavelength of 632.8nm and maximum
sample size of 150mm x 150mm.
Resolution & accuracy:
Polarizer or analyzer: 0.05°
Delta: 0.1°
PSI: 0.05°
Measuring time:
Single film: 15 seconds
Double film: 20 seconds
Power Requirement:
115 V 50/60 Hz 1 Phase
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Click Photos to Enlarge
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