inch-diameter by 9-inch-high stainless steel substrate chamber
that is hinged and spring-loaded. Pumping module has a speed
of 1000 liters/second at the high vacuum and more than 800
liters/second at the evaporation chamber. System is all stainless
steel to achieve highest vacuum integrity and easy cleaning. All
internal surfaces exposed to high vacuum are #4 finish. In
addition, all dynamic seals are bellows-sealed, and o-rings are
used only as static seals.
Additional Specs:
• CV-8 power supply
• Six 15cc hearths
• TFI Telemark 270 series gun with XYS sweep control
• Cryopump
• Granville Phillips ionization gauge
• Inficon crystal monitor
• Fixed 8" substrate carrier
• Rotary substrate motor driving system
• Planetary dome
• MKS gas flow controller
