AMAT Centura 5200 Etch
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  • CH-A: IPS  
  • CH-C: eMAX, oxide etch chamber
  • CH-D: eMXP+, enhanced MXP+ oxide etch chamber
  • CH-F: remote orientor/center finder
  • Mainframe: Centura mainframe
  • Gas panel: Centura gas panel with Seriplex control
  • Narrow body tilt-out loadlocks
  • Remote frame, Centura VME rack with turbo controllers and Centura     
    RF generator Rack
  • Four vacuum pumps: CH-C, CH-D, loadlock, and X-fer  chamber
  • Neslab HX-150 chiller for CH-D wall, Neslab HX-150 chiller for CHD      
  • BEA Aerospace chiller for CH-C wall and cathode